Measuring device for plotting current voltage characteristics of Langmuir probes and determination of velocity distribution of electrons in low pressure plasma for microelectronic applications

A measuring device for the determination of plasma parameters, such as ion density, electron temperature, and plasma potential has been developed. The instrument is used for plotting current voltage characteristics of Langmuir probes and for determining the electron velocity distribution in low pressure plasma for microelectronic applications. Measurements in two different ion sources have been carried out in which the plasma is produced either by low pressure dc arc discharge (with glow cathode) or by hollow cathode glow discharge (without glow cathode)