Published December 15, 2009
| Version v1
Journal article
Defect structure of zinc doped silicon studied by X-ray diffuse scattering method
- 1. Moscow State Institute of Steel and Alloys, Leninskiy prosp., 4, Moscow 119049 (Russian Federation)
- 2. Institute of Physics and Technology, Russian Academy of Sciences, Nakhimovskiy prosp., 34, Moscow 117218 (Russian Federation)
Description
The results of investigation of microdefects (MDs) in Zn doped n-type Si by X-ray diffuse scattering (XRDS) method are presented. Experimental samples were made by a high-temperature diffusion annealing of Zn with subsequent quenching and tempering. The crystal lattice of the samples is found to contain spherical MDs of vacancy type and plane shape MDs of interstitial type with average radius about 0,1 and 2 μm. The MDs average radius and their type depend on Zn doping level and thermal treatment after compensation diffusion.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.physb.2009.08.301Additional details
Identifiers
- DOI
- 10.1016/j.physb.2009.08.301;
- PII
- S0921-4526(09)00888-6;
Publishing Information
- Journal Title
- Physica. B, Condensed Matter
- Journal Volume
- 404
- Journal Issue
- 23-24
- Journal Page Range
- p. 4630-4633
- ISSN
- 0921-4526
- CODEN
- PHYBE3
Conference
- Title
- 25. international conference on defects in semiconductors
- Dates
- 20-24 Jul 2009
- Place
- St. Petersburg (Russian Federation)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41089615
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; CRYSTAL DEFECTS; CRYSTAL LATTICES; DIFFUSE SCATTERING; DIFFUSION; DOPED MATERIALS; IMPURITIES; INTERSTITIALS; QUENCHING; SILICON; SPHERICAL CONFIGURATION; TRANSITION ELEMENTS; VACANCIES; X RADIATION; ZINC; ZINC ADDITIONS
- Descriptors DEC
- ALLOYS; COHERENT SCATTERING; CONFIGURATION; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELEMENTS; HEAT TREATMENTS; IONIZING RADIATIONS; MATERIALS; METALS; POINT DEFECTS; RADIATIONS; SCATTERING; SEMIMETALS; ZINC ALLOYS
Optional Information
- Copyright
- Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.