YBa2Cu3Co7δ insulator multi-layers for crossover fabrication

The development of thin-film dielectrics compatible with the epitaxial growth of YBa2Cu3O7-δ (YBCO) is crucial to the fabrication of multilayer device and circuit structures. The authors of this paper investigate the YBCO/SrTiO3 (STO) system by fabricating YBCO/STO bilayers and simple YBCO/STO/YBCO crossover structures. The thin films were deposited in situ by pulsed laser deposition and analyzed using x-ray diffraction and scanning electron microscopy. The film interfaces were characterized by secondary ion mass spectrometry (SIMS) depth profiling. The authors have developed photolithographic and wet-etching processes for patterning the crossovers which are compatible with these materials