PIC-MC simulation of an RF capacitively coupled Ar/H2 discharge

A 1D3v self-consistent particle-in-cell/Monte Carlo simulation is used to investigate the role of small amounts of hydrogen added to an RF capacitively coupled argon discharge at low pressure. The addition of H2 has an important effect on the discharge behaviour, especially on the electron density, the density of the various ions, and the electron energy probability function. These effects can be explained in terms of the collision processes taking place in the discharge. The simulations were carried out in the pressure range 100-250 mTorr, at a voltage of 300 V, and a driving frequency of 13.56 MHz. The partial hydrogen pressure was in the range 0-10%