Microwave ion source for low charge state ion production

The Plasma and Ion Source Technology Group at LBNL have developed a microwave ion source. The source consists of a stainless-steel plasma chamber, a permanent-magnet dipole structure and a coaxial microwave feed. Measurements were carried out to characterize the plasma and the ion beam produced in the ion source. These measurements included current density, charge state distribution, gas efficiency and accelerated beam emittance measurements. Using a computer controlled data acquisition system a new method of determining the saturation ion current was developed. Current density of 3-6 mA/cm2 was measured with the source operating in the over dense mode. The highest measured charge-states were Ar5+, O3+ and Xe7+. Gas efficiency was measured using a calibrated argon leak. Depending on the source pressure and discharge power, more than 20% total gas efficiency was achieved. The emittance of the ion beam was measured by using a pepper-pot device. Certain spread was noticed in the beam emittance in the perpendicular direction to the source dipole field. For the parallel direction to the magnetic field, the normalized rr' emittance of 0.032 π-mm-mrad at 13 kV of acceleration voltage and beam exit aperture of 3-mm-in-diameter was measured. This compares relatively well with the simulated value of 4 rms, normalized emittance value of 0.024 π-mm-mrad