Published 1977
| Version v1
Miscellaneous
An investigation of peculiarities of dielectric film ion sputtering by means of the SIMS technique
- 1. AN Ukrainskoj SSR, Kiev. Inst. Poluprovodnikov
Description
no abstract available
Additional details
Publishing Information
- Imprint Place
- Moscow
- Imprint Title
- Preliminary programme and abstracts of papers presented at the 7. international conference on atomic collisions in solids
- Imprint Pagination
- p. 337-338.
- Report number
- INIS-mf--3996
Conference
- Title
- 7. international conference on atomic collisions in solids.
- Dates
- 19 - 23 Sep 1977.
- Place
- Moscow, USSR.
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 9364064
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- AMORPHOUS STATE; CRYSTALS; DIELECTRIC MATERIALS; ENERGY SPECTRA; FILMS; ION EMISSION; MASS SPECTRA; QUARTZ; SILICON NITRIDES; SPUTTERING
- Descriptors DEC
- CHALCOGENIDES; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS; SILICON OXIDES; SPECTRA
Optional Information
- Notes
- Published in summary form only.