Preparation and characterization of cubic boron nitride and carbon nitride films
Creators
- 1. Fraunhofer-Institut fuer Schicht- und Oberflaechentechnik, Braunschweig (Germany)
Description
Cubic boron nitride (c-BN) is a super hard material with a high potential for applications in different fields. At present c-BN films are being prepared mainly by CVD or PVD techniques. These techniques as well as the different methods used to characterize the films will be discussed. Theoretical considerations have shown that a super hard carbon nitride phase β-C3N4 with mechanical properties equivalent to or even better than those of diamond can exist. In recent years there were many attempts to prepare carbon nitride coatings by PVD or CVD techniques. An essential problem is the incorporation of sufficiently high concentrations of nitrogen in the films. A clear evidence of crystalline β-C3N4 phases in C-N films is outstanding so far. (author). 40 refs., 1 fig
Additional details
Publishing Information
- Publisher
- Societe Francaise du Vide.
- Imprint Place
- Paris (France)
- Imprint Title
- Trends and new applications in thin films
- Imprint Pagination
- 298 p.
- Journal Page Range
- p. 70-75.
Conference
- Title
- 5. International Symposium on Trends and New Applications in Thin Films.
- Dates
- 1-3 Apr 1996.
- Place
- Colmar (France).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 28000299
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABSORPTION SPECTROSCOPY; BORON NITRIDES; CARBON NITRIDES; CHEMICAL VAPOR DEPOSITION; CUBIC LATTICES; ELECTRON CYCLOTRON-RESONANCE; GLOW DISCHARGES; ION BEAMS; ION IMPLANTATION; MAGNETRONS; MICROHARDNESS; PHYSICAL VAPOR DEPOSITION; PLASMA ARC SPRAYING; SPUTTERING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- BEAMS; BORON COMPOUNDS; CARBON COMPOUNDS; CHEMICAL COATING; COATINGS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CYCLOTRON RESONANCE; DEPOSITION; ELECTRIC DISCHARGES; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; HARDNESS; MECHANICAL PROPERTIES; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RESONANCE; SPECTROSCOPY; SPRAY COATING; SURFACE COATING