Published May 15, 1985 | Version v1
Journal article Metadata-only

Materials characterization with a He+ microbeam

Creators

  • 1. General Electric Co., Schenectady, NY (USA). Corporate Research and Development Dept.
  • 2. State Univ. of New York, Albany (USA). Dept. of Physics

Description

A beam of 2 MeV He+ ions has been apertured and demagnified to give a spot approximately 1 μm in diameter. The beam can be scanned in a 150 by 150 μm raster, and a secondary electron image formed to assist in placing the beam on features to be analyzed. Rutherford backscattering spectroscopy (RBS) and particle induced X-rays emission (PIXE) have been performed with a spatial resolution of about 2 μm and used to analyze metallized conductors for microelectric applications. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods Phys. Res., Sect. B
Journal Volume
10/11
Journal Issue
pt.2
Series
CODEN: NIMBE.;Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
697-699
ISSN
0168-583X

Conference

Title
8. international conference on the application of accelerators in research and industry.
Dates
12-14 Nov 1984.
Place
Denton, TX (USA).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
16081049
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BACKSCATTERING; BEAM TRANSPORT; CRYSTALLOGRAPHY; HELIUM 4 BEAMS; INTEGRATED CIRCUITS; ION SPECTROSCOPY; METALS; MEV RANGE 01-10; PIXE ANALYSIS; RUTHERFORD SCATTERING; SPATIAL RESOLUTION
Descriptors DEC
BEAMS; CHEMICAL ANALYSIS; ELASTIC SCATTERING; ELECTRONIC CIRCUITS; ELEMENTS; ENERGY RANGE; ION BEAMS; MEV RANGE; NONDESTRUCTIVE ANALYSIS; RESOLUTION; SCATTERING; SPECTROSCOPY; X-RAY EMISSION ANALYSIS