Implantation metallurgy

Important changes in the near-surface physical properties of metals have been obtained by high-fluence ion implantation. Recently there have been an increasing number of studies of the behaviour of implanted species with the aim of understanding the detailed physical processes which occur in an implanted metal layer. A key aspect of these 'implantation metallurgy' studies has been the ability to form uniquely controlled systems in the near-surface regions of metals which can be studied with accurate depth resolution. In this way one may measure metallurgical parameters which may be difficult or imposible to obtain by other means. Also, one may determine parameters which depend on the implantation process, due to the athermal introduction of atoms and defects. Thus the dual objective of implantation metallurgy is to obtain information to improve the understanding of the microscopic aspects of metallurgy and also to understand how to form controlled new metallurgical systems. Examples of parameters which have been studied include implanted impurity location, diffusion, enhanced diffusion, solubility, precipitation, and dissolution. (author)