Published December 2007 | Version v1
Journal article Metadata-only

Fabrication of large area nanodot arrays by assistance of low energy ion bombardment

Creators

  • 1. Chinese Academy of Sciences, Shanghai (China). Shanghai Inst. of Applied Physics
  • 2. National Academy of Nanotechnology and Engineering, Tianjin (China)

Description

An ion beam assisted method for large-area fabrication of nanodot arrays in anodic alumina oxide (AAO) templates was investigated. By this method, ordered arrays of Ni and Au nanodots with highly uniform diameters and density of 1.2xl010/cm2 were fabricated. The diameter and packing density of nanodots can be controlled by the cell parameters of AAO template. The fabrication method presented here can be extended to many other materials and allows further investigation of the size related characteristics in nanodot structures. (authors)

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
30
Journal Issue
12
Journal Page Range
p. 995-1000
ISSN
0253-3219

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
40042707
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ALUMINIUM OXIDES; ARGON IONS; DENSITY; FABRICATION; GOLD; ION BEAMS; NANOSTRUCTURES; NICKEL; OPENINGS; PLATES; QUANTUM DOTS; SPUTTERING
Descriptors DEC
ALUMINIUM COMPOUNDS; BEAMS; CHALCOGENIDES; CHARGED PARTICLES; ELEMENTS; IONS; METALS; NANOSTRUCTURES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TRANSITION ELEMENTS

Optional Information

Notes
6 figs., 21 refs.