Published June 5, 2012
| Version v1
Journal article
Commissioning of soft and deep X-ray lithography beamline on Indus-2
- 1. Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indore (India)
Description
Soft and Deep x-ray lithography (SDXRL) beamline is commissioned on Indus-2. The beamline can be operated between 1.5 to 20 keV and in white beam mode. Beamline consists of two x-ray mirrors, slits, Be-windows, beam diagnostics and filters assemblies and radiation safety systems. A custom built X-ray scanner is used to create 3-D high aspect ratio micro structures. The paper reports the commissioning results of this beamline.
Additional details
Identifiers
- DOI
- 10.1063/1.4710111;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 1447
- Journal Issue
- 1
- Journal Page Range
- p. 527-528
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 56. DAE solid state physics symposium 2011
- Dates
- 19-23 Dec 2011
- Place
- Kattankulathur, Tamilnadu (India)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43094214
- Subject category
- S43: PARTICLE ACCELERATORS; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ASPECT RATIO; BEAM MONITORS; BEAM TRANSPORT; COMMISSIONING; FILTERS; INDUS-2; KEV RANGE; MASKING; MICROSTRUCTURE; MIRRORS; PHOTON BEAMS; RADIATION PROTECTION; X RADIATION
- Descriptors DEC
- BEAMS; DIMENSIONLESS NUMBERS; ELECTROMAGNETIC RADIATION; ENERGY RANGE; IONIZING RADIATIONS; MEASURING INSTRUMENTS; MONITORS; RADIATION SOURCES; RADIATIONS; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES
Optional Information
- Notes
- (c) 2012 American Institute of Physics