Published 1996
| Version v1
Book
Properties of nitrogen containing diamond-like carbon films
Creators
- 1. AN Ukrainskoj SSR, Kiev (Ukraine). Inst. Fiziki
Description
Optical and mechanical properties of nitrogen containing diamond- like carbon (NC-DLC) films deposited by RF plasma decomposition of CH4:H2:N2 gas mixture were investigated. Nitrogen was incorporated into DLC films both during film growth and after deposition of film by implantation of nitrogen ions. It was shown that both optical and mechanical properties of the films strongly depend on nitrogen content in the films. In some cases the mechanical properties of nitrogen implanted films were improved in comparison with unimplanted samples. (author). 7 refs., 2 figs
Additional details
Publishing Information
- Publisher
- Societe Francaise du Vide.
- Imprint Place
- Paris (France)
- Imprint Title
- Trends and new applications in thin films
- Imprint Pagination
- 298 p.
- Journal Page Range
- p. 160-162.
Conference
- Title
- 5. International Symposium on Trends and New Applications in Thin Films.
- Dates
- 1-3 Apr 1996.
- Place
- Colmar (France).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 28000453
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CARBON; CARBON NITRIDES; CATHODE SPUTTERING; CRYSTAL GROWTH; ION IMPLANTATION; MICROHARDNESS; NITROGEN ADDITIONS; NITROGEN IONS; OPTICAL PROPERTIES; PLASMA ARC SPRAYING; PROTECTIVE COATINGS; SOLAR CELLS; THIN FILMS; VAPOR DEPOSITED COATINGS; YOUNG MODULUS
- Descriptors DEC
- CARBON COMPOUNDS; CHARGED PARTICLES; COATINGS; DEPOSITION; DIRECT ENERGY CONVERTERS; ELEMENTS; EQUIPMENT; FILMS; HARDNESS; IONS; MECHANICAL PROPERTIES; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PHYSICAL PROPERTIES; PNICTIDES; SOLAR EQUIPMENT; SPRAY COATING; SPUTTERING; SURFACE COATING