Published 1987 | Version v1
Book

Sheath physics and materials science results from recent plasma source ion implantation experiments

  • 1. Dept. of Nuclear Engineering and Engineering Physics, Univ. of Wisconsin-Madison

Description

Plasma Source Ion Implantation (PSII) is a surface modification technique which has been optimized for ion-beam processing of materials. PSII departs radically from conventional implantation by circumventing the line of sight restriction inherent in conventional ion implantation. The authors used PSII to implant cutting tools and dies and have demonstrated substantial improvements in lifetime. Recent results on plasma physics scaling laws, microstructural, mechanical, and tribological properties of PSII-implanted materials are presented

Additional details

Publishing Information

Publisher
IEEE Service Center.
Imprint Place
Piscataway, NJ (USA)
Imprint Title
The 1987 IEEE international conference on plasma science (Abstracts)
Journal Page Range
p. 124.

Conference

Title
IEEE international conference on plasma science.
Dates
1-3 Jun 1987.
Place
Crystal City, VA (USA).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
19047799
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CUTTING TOOLS; DIES; HARDENING; ION BEAMS; ION IMPLANTATION; MECHANICAL PROPERTIES; MICROSTRUCTURE; MODIFICATIONS; OPTIMIZATION; PLASMA; PLASMA FOCUS; PLASMA SHEATH; SCALING LAWS; SURFACE PROPERTIES; SURFACES; USES
Descriptors DEC
BEAMS; CRYSTAL STRUCTURE; EQUIPMENT; TOOLS