Synchrotron radiation sources and condensers for projection x-ray lithography
- 1. National Synchrotron Light Source, Brookhaven National Laboratory, Upton, New York 11973 (United States)
- 2. AT ampersand T Bell Laboratories at 600 Mountain Avenue, Murray Hill, New Jersey 07974 (United States)
- 3. AT ampersand T Bell Laboratories at 510E Brookhaven Laboratory, Upton, New York 11973 (United States)
- 4. AT ampersand T Bell Laboratories at Crawfords Corner Road, Holmdel, New Jersey 07733 (United States)
Description
The design requirements for a compact electron storage ring that could be used as a soft-x-ray source for projection lithography are discussed. The design concepts of the x-ray optics that are required for collecting and conditioning the radiation in divergence, uniformity, and direction to illuminate the mask correctly and the particular x-ray projection camera used are discussed. Preliminary designs for an entire soft-x-ray projection lithography system that uses an electron storage ring as a soft-x-ray source are presented. It is shown that, by combining the existing technology of storage rings with large collection angle condensers, a powerful and reliable source of 130-A photons for production line projection x-ray lithography is possible
Additional details
Publishing Information
- Journal Title
- Applied Optics
- Journal Volume
- 32
- Journal Issue
- 34
- Journal Page Range
- p. 6920-6929.
- ISSN
- 0003-6935
- CODEN
- APOPAI
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 25040328
- Subject category
- S43: PARTICLE ACCELERATORS; S42: ENGINEERING;
- Descriptors DEI
- BEAM OPTICS; DESIGN; ELECTRON BEAMS; FABRICATION; INTEGRATED CIRCUITS; MASKING; MIRRORS; SOFT X RADIATION; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES
- Descriptors DEC
- BEAMS; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; IONIZING RADIATIONS; LEPTON BEAMS; PARTICLE BEAMS; RADIATION SOURCES; RADIATIONS; X RADIATION