Detecting magnetic field direction by a micro beam operating in different vibration modes

A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic field is applied with an alternating current, the micro beam is actuated under the effect of the Lorentz forces. Magnetic fields of different directions cause different vibration profiles. The direction of the magnetic field is obtained by measuring the vibration amplitudes of the micro beam, which is driven to work at first- and second-order resonant modes. A micro structure has been fabricated using the bulk micromachined silicon process. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes. The experimental results show that the amplitude of the structure, which depends on the different modes, is a sine or cosine function of the angle of the magnetic field. It agrees well with the simulation result. Currently a resolution of 10° for the magnetic field direction measurement can be obtained using the detecting principle. (condensed matter: electronic structure, electrical, magnetic, and optical properties)