Ion-induced Auger emission and sputtering processes in solids

Extensive measurements have been made of the electron emission from aluminium induced by bombardment with Cs+ ions. The equipment used is a quadrupole-based SIMS instrument, especially fitted with an electron-energy analyser for observing electron emission from the point of ion-beam incidence. A strong variation of ion-induced Auger spectra with angle of ion-beam incidence is observed and measurements of Auger emission from sputtered aluminium and caesium-aluminium species are reported in detail. Correlation of depth profiles for an aluminium-on-silicon structure, measured by SIMS and by ''dynamic'' ion-induced Auger emission, provide evidence for a proposed contribution to the atomiclike peaks of the Auger spectra from sputtered caesium-aluminium molecular species. (orig.)