Published August 2005
| Version v1
Journal article
Effect of hydrogenation on the optical and structural properties of GaAs thin films prepared by rf-magnetron sputtering
- 1. Laboratorio Nacional de Luz Sincrotron, Caixa Postal 6192, CEP 13084-971 Campinas-SP (Brazil)
- 2. Faculdade de Ciencias, UNESP, Bauru-SP, CEP 17033-360 (Brazil)
- 3. Centro de Ciencia e Ingenieria de Materiales (CICIMA), Universidad de Costa Rica, 2060 San Jose (Costa Rica)
Description
We have utilized infra-red and optical absorption measurements, grazing incidence X-ray diffraction (GIXRD) and extended X-ray absorption fine structure (EXAFS) measurements to investigate the influence of hydrogenation on the optical and structural properties of GaAs thin films prepared by rf-magnetron sputtering. Hydrogenation induces distinct changes in the optical properties, namely shifts in the absorption edges and reduction of the Urbach energy. Such modifications are correlated to a reduction in structural disorder as determined by EXAFS and the increase of crystallinity determined by GIXRD
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2005.06.071;
- PII
- S0168-583X(05)01018-9;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 238
- Journal Issue
- 1-4
- Journal Page Range
- p. 329-333
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 4. conference on synchrotron radiation in materials science
- Dates
- 23-25 Aug 2004
- Place
- Grenoble (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37024992
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABSORPTION; ABSORPTION SPECTROSCOPY; FINE STRUCTURE; GALLIUM ARSENIDES; MAGNETRONS; OPTICAL PROPERTIES; REDUCTION; SPUTTERING; THIN FILMS; X RADIATION; X-RAY DIFFRACTION; X-RAY SPECTROSCOPY
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; CHEMICAL REACTIONS; COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; GALLIUM COMPOUNDS; IONIZING RADIATIONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; PHYSICAL PROPERTIES; PNICTIDES; RADIATIONS; SCATTERING; SORPTION; SPECTROSCOPY
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.