A Hybrid Solution of the Nonuniform Solenoidal-Type Inductively Coupled Plasma Heating Problem

A hybrid solution of the nonuniform planar-type ICP (inductively coupled plasma) heating problem was developed recently. The research shows that the hybrid method can significantly save computing time and the nonuniform plasma parameters can be easily considered by adopting a numerical method in the plasma region. In this work, the hybrid method is extended to a solenoidal- type ICP. Some results for the solenoidal-type ICP are obtained and compared with those for a planar type ICP. The efficient of the density profile turns out not to be significant in the solenoidal case relative to the planar case.