Published March 1982
| Version v1
Journal article
Anisotropy of deformation in a gallium arsenide lattice on ion implantation
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Анизотропия деформации решетки арсенида галлия при ионной имплантации
Publishing Information
- Journal Title
- Zh. Tekh. Fiz.
- Journal Volume
- 52
- Journal Issue
- 3
- Series
- Zh. Tekh. Fiz.
- Journal Page Range
- 586-588
- ISSN
- 0044-4642
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- USSR
- INIS RN
- 14717079
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- DEFORMATION; GALLIUM ARSENIDES; HELIUM IONS; ION IMPLANTATION; LATTICE PARAMETERS; PHYSICAL RADIATION EFFECTS; SILICON IONS
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; ATOMIC IONS; CHARGED PARTICLES; GALLIUM COMPOUNDS; IONS; RADIATION EFFECTS
Optional Information
- Notes
- Short note. For English translation see the journal Soviet Physics - Technical Physics (USA).