Effect of Multiple Elastic Electron Scattering on Formation of Ionization Lines from Unordered Semiinfinite Targets

The influence of multiple elastic scattering (E S) of mid-energy electrons on the intensity of ionization lines of Si, C, mo has been investigated in the geometry with reflection using the Monte-Carlo method. It is shown the multiple E S is important and with the growth of primary electron energy it becomes more significant. This effect is explained in the paper. The majority of multiple E S takes place in the range of rather small angles, which allows the quantitative use of the two-stage model in formation of ionization lines for practical experimental purposes