Calculation of angular distribution of scattered ions using the method of discrete fluxes

Numerical solution of the problem of angular distribution of ions, scattered from a solid body surface, is given. It is shown that a notion of medium-energy ions scattering in a solid body as multiple scattering from its atoms at small angles (diffusion approximation) is quite true for the problem of scattering from light targets. While going to the problem of scattering from heavy targets, it is necessary to take into account the energy dependence of the scattered particle distribution function more strictly