Published February 1, 2020 | Version v1
Journal article Metadata-only

Photoacid generators. Application and current state of development

Creators

  • 1. State Scientific Center 'Organic Intermediates and Dyes Institute' (NIOPIK), ul. Bolshaya Sadovaya 1, kor. 4, 123001 Moscow (Russian Federation)
  • 2. Institute of Problems of Chemical Physics, Russian Academy of Sciences, prosp. Akademika Semenova 1, 142432 Chernogolovka, Moscow Region (Russian Federation)
  • 3. Molecular Electronics Research Institute, Pervyi Zapadnyi pr. 12, stroenie 1, 124460 Moscow, Zelenograd (Russian Federation)

Description

Photoacid generators are used as components of photocurable polymer formulations and chemically amplified photoresists in microelectronics industry. In recent years, these compounds gained importance as components of various engineering materials. The review presents the classification of photoacid generators and summarizes data on photochemical processes giving photoacids. A special section is devoted to practical applications of photoacid generators and the current state of their development.

The bibliography includes 118 references. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1070/RCR4899

Additional details

Identifiers

DOI
10.1070/RCR4899;

Publishing Information

Journal Title
Russian Chemical Reviews (Print)
Journal Volume
89
Journal Issue
2
Journal Page Range
p. 173-190
ISSN
0036-021X

INIS

Country of Publication
Russian Federation
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
52116234
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
MICROELECTRONICS; PHOTOCHEMICAL REACTIONS; POLYMERS
Descriptors DEC
CHEMICAL REACTIONS