Optimization study of a soft x ray flat field spectrometer

Using ray tracing code and optical path function, optimization calculation is carried out on a grazing incidence soft x ray flat field spectrometer with toroidal mirror as prepositive optic system. The authors calculate the spectral and spatial resolution of the spectrometer system. The wave front aberration theory and ray tracing code indicate that the system has good spectral resolution (λ/Δλ) better than 1000 and spatial resolution better than 40 μm in the spectrum range of 4-45 nm