Published 2007 | Version v1
Journal article

Growth and characterization of thin films of ZnO and ZnMnO by ALE

  • 1. Institute of Physics, Polish Academy of Sciences, Warsaw (Poland)

Description

We discuss growth of thin films of ZnO by atomic layer epitaxy (ALE), often referred to as atomic layer deposition (ALD). Properties of ZnO and ZnMnO films are studied with several characterization techniques, including X-ray diffraction (XRD), atomic force microscopy (AFM) and cathodoluminescence (CL). (author)

Additional details

Publishing Information

Journal Title
Tishreen University Journal for Studies and Scientific Research
Journal Volume
29
Journal Issue
2
Journal Page Range
p. 15-20
CODEN
TUJOEY

Conference

Title
2. workshop on physics of semiconductor sciences
Dates
24-26 Apr 2005
Place
Latakia (Syrian Arab Republic)

Optional Information

Notes
5 figs.