Cleaning of parts for UHU of physical equipment

On the basis of experiences of prominent Soviet organizations and other world-wide known vacuum firms and Physics Institutes, as well as on the basis of the analysis of the report of the subcommittee of the American Vacuum Society (AVS) and our own experience a scheme of cleaning of parts for UHU of stainless steel has been reported. In the first part of this paper the following is reviewed: form and classification of contaminations, their source and their negative effect on vacuum. The position of contaminations on the surface of vacuum parts is also mentioned. Principles of choice of vacuum materials, main rules of technological cleaning and recommended technology of cleaning of parts of stainless steel of a vacuum system for creating UHU of physical equipment are described. 41 refs., 1 fig