Published December 24, 1980
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Recent improvements in monomolecular resists
Creators
- 1. Centre d'Etudes Nucleaires de Saclay, Services d'Electronique de Saclay (France)
Description
This letter describes recent results obtained with ω-tricosenoic acid in the field of monomolecular electron-resists, following a thorough purification in the course of the synthesis. Sensitivity undergoes a hundredfold improvement and reaches 0.5 μC/cm2; contrast in increased from 0.7 to 2.4. These results seem to be due to an increase in length of the polymer. Better contrast improves resolution, which is now down to 600 A on a 900 A thick film. (authors)
Abstract (French)
Cette lettre decrit les derniers resultats obtenus dans le domaine des electronresists en couches monomoleoulaires avec l'acide ω-tricosenoique a la suite d'une purification extensive au cours de la synthese. La sensibilite est amelioree d'un facteur 100 et descend a 0,5 μC/cm2; le contraste passe de 0,7 a 2,4. Ce resultat semble du a l'augmentation de longueur des polymeres lineaires formes. Le gain de contraste a permis d'ameliorer la resolution, qui est maintenant de 600 A avec un film de 900 A d'epaisseur. (auteurs)Files
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Additional details
Additional titles
- Original title (French)
- Progres recents dans les resists monomoleculaires
Publishing Information
- Imprint Pagination
- 9 p.
- Report number
- CEA-N--2188
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 49083789
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- INFRARED SPECTRA; MASKING; POLYMERIZATION; RESINS; SCANNING ELECTRON MICROSCOPY; SENSITIVITY; SPATIAL RESOLUTION; THIN FILMS
- Descriptors DEC
- CHEMICAL REACTIONS; ELECTRON MICROSCOPY; FILMS; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; POLYMERS; RESOLUTION; SPECTRA
Optional Information
- Notes
- 3 refs.; Available from the INIS Liaison Officer for France, see the INIS website for current contact and E-mail addresses