Quantitative microscale determination of boron spatial distributions with the aid of neutron-induced autoradiography

On the basis of the measurements of the effect of gamma and electron doses as well as of the temperature during irradiation on the bulk etch rate, of solid state track detectors (SSTD) suitable conditions for irradiation in the nuclear reactor were established. Under these conditions standard curves for boron concentrations c=1015-1021 atoms per cm3 were prepared. The per cent error of the determination of boron concentration amounts to +-50%, for boron concentrations lower than 1016 and to +-10% for concentrations higher than 1016 cm-3. The spatial resolution is approximately 10 μm, the lower limit of detection -104 atoms boron per cm3 in silicon. (author)