Published 1996
| Version v1
Book
Study of the deposition process of TiBN films obtained by D.C. magnetron sputtering
Description
Growing of Ti-B-N films obtained by DC magnetron cathodic sputtering is studied. The wide influence of process parameters such nitrogen flow rate, bias voltage and growing temperature on composition and on mechanical properties such hardness, wear resistance, intrinsic stress is pointed out. Hard and wear resistant coatings with low compressive stresses are achieved. (author). 13 refs., 6 figs
Additional details
Publishing Information
- Publisher
- Societe Francaise du Vide.
- Imprint Place
- Paris (France)
- Imprint Title
- Trends and new applications in thin films
- Imprint Pagination
- 298 p.
- Journal Page Range
- p. 116-118.
Conference
- Title
- 5. International Symposium on Trends and New Applications in Thin Films.
- Dates
- 1-3 Apr 1996.
- Place
- Colmar (France).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 28000301
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BORON NITRIDES; CATHODE SPUTTERING; CRYSTAL STRUCTURE; CRYSTAL-PHASE TRANSFORMATIONS; MAGNETRONS; NITROGEN; PHOTON EMISSION SCANNING; RESIDUAL STRESSES; SYNTHESIS; THIN FILMS; TITANIUM NITRIDES; VAPOR DEPOSITED COATINGS; WEAR RESISTANCE; X-RAY DIFFRACTION
- Descriptors DEC
- BORON COMPOUNDS; COATINGS; COHERENT SCATTERING; DIAGNOSTIC TECHNIQUES; DIFFRACTION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; MECHANICAL PROPERTIES; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PHASE TRANSFORMATIONS; PNICTIDES; SCATTERING; SPUTTERING; STRESSES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS