Published 2010 | Version v1
Book

Obtaining thin films of metal oxide by ion-beam technology

Creators

  • 1. Moskovskij Gosudarstvennyj Univ. im. M.V. Lomonosova (MGU), Khimicheskij Fakul'tet, Moscow (Russian Federation)

Description

no abstract available

Part of:
XIII International science and technology conference High-tech chemical technologies-2010 with elements of Scientific school for young people Innovations in chemistry: achievements and prospects. Summaries of reports

Additional details

Additional titles

Original title (Russian)
Получение тонких оксидных пленок металлов с помощью ионно-лучевой технологии
Augmented title (English)
Metals: Mo, W, Nb, Ta

Publishing Information

Publisher
GOUVPO Ivan. Gos. Khim.-Tekhnol. Un-t
Imprint Place
Ivanovo (Russian Federation)
ISBN
978-5-9616-0261-6
Imprint Title
XIII International science and technology conference High-tech chemical technologies-2010 with elements of Scientific school for young people Innovation in chemistry: achievements and prospects. Summary of reports
Imprint Pagination
595 p.
Journal Page Range
p. 281

Conference

Title
achievements and prospects
Original Conference Title
XIII Mezhdunarodnaya nauchno-tekhnicheskaya konferentsiya Naukoemkie khimicheskie tekhnologii-2010 s ehlementami Nauchnoj shkoly dlya molodezhi Innovatsii v khimii: dostizheniya i perspektivy
Acronym
8. international science and technology conference on high-tech chemical technologies 2010 with elements of Scientific school for young people innovation in chemistry
Dates
29 Jun - 2 Jul 2010
Place
Ivanovo (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
44065188
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ARGON IONS; ION BEAMS; MOLYBDENUM OXIDES; NIOBIUM OXIDES; OXIDATION; OXYGEN IONS; TANTALUM OXIDES; THIN FILMS; TUNGSTEN OXIDES
Descriptors DEC
BEAMS; CHALCOGENIDES; CHARGED PARTICLES; CHEMICAL REACTIONS; FILMS; IONS; MOLYBDENUM COMPOUNDS; NIOBIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; REFRACTORY METAL COMPOUNDS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TUNGSTEN COMPOUNDS

Optional Information

Notes
Imprint:XIII Mezhdunarodnaya nauchno-tekhnicheskaya konferentsiya Naukoemkie khimicheskie tekhnologii-2010 s ehlementami Nauchnoj shkoly dlya molodezhi Innovatsii v khimii: dostizheniya i perspektivy. Tezisy dokladov