Monte Carlo calculation of the contribution of backscattered electrons to secondary electron emission from aluminium

A Monte Carlo model for the simulation of electron penetration into aluminium and for the generation and emission of secondary electrons is presented. Monte Carlo calculations for the penetration and backscattering of primary electrons show good agreement with experiment, while the dependence of the secondary electron yield on the primary electron energy show qualitative agreement with experimental measurements. β, which is defined as the relative efficiency of backscattered electrons for producing secondary electrons which escape the surface over that of the primary electrons on their inward path, is found to be ∼6-7 for primary electrons in the energy range 3-25 keV. (author)