Investigation into water-induced surface oxidization of GaN lamella structure
- 1. Department of Mechanical Engineering, Khalifa University of Science and Technology, P.O. Box 127788, Abu Dhabi (United Arab Emirates)
- 2. Research Center for Materials Analysis, Korea Basic Science Institute, Daejeon 34133 (Korea, Republic of)
Description
The interaction between gallium nitride (GaN) and H2O has been thoroughly investigated using a novel methodology involving the fabrication of a well-defined nanometer scale GaN lamella by means of a focused ion beam milling technique. Electrical characterization results show that the exposure of the GaN surface to water at room temperature causes the device resistivity to continuously increase, which makes the GaN lamella a stable polar liquid sensor. To explain the relationship between the reduced conductivity of GaN and water dissociation on the GaN surface, we utilize surface sensitive x-ray photoelectron spectroscopy and density-functional theory calculations to investigate surface oxidation of the dry and wet GaN surface. Our studies show that the water molecules are stably adsorbed on the GaN surface and are favorable to being dissociated into hydrogen atoms and hydroxyl groups on the GaN surface even if the surface is oxidized. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6641/ac038dAdditional details
Identifiers
Publishing Information
- Journal Title
- Semiconductor Science and Technology
- Journal Volume
- 36
- Journal Issue
- 8
- Journal Page Range
- [9 p.]
- ISSN
- 0268-1242
- CODEN
- SSTEET
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 53056081
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- DENSITY FUNCTIONAL METHOD; DISSOCIATION; GALLIUM NITRIDES; HYDROGEN; HYDROXIDES; INTERACTIONS; ION BEAMS; LIQUIDS; OXIDATION; SENSORS; SURFACES; WATER; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- BEAMS; CALCULATION METHODS; CHEMICAL REACTIONS; ELECTRON SPECTROSCOPY; ELEMENTS; FLUIDS; GALLIUM COMPOUNDS; HYDROGEN COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; SPECTROSCOPY; VARIATIONAL METHODS