Published July 1991 | Version v1
Journal article

In-situ preparation of Bi-Sr-Ca-Cu-O thin films using an ECR oxygen plasma beam

  • 1. Superconductivity Research Lab., ISTEC, Tokyo (Japan)

Description

Thin films of Bi-Sr-Ca-Cu-O have been grown in situ on MgO(100) substrates at substrate temperatures of 625-725degC. Each of the constituents, Bi2O3, Sr, Ca and Cu, was sequentially deposited with an ECR oxygen plasma beam which had a current density of oxygen ions of about 3-4 μA/cm2 to grow various Bi2Sr2Can-1CunOx phases. Reflection high-energy electron diffraction patterns observed during deposition also showed the formation of Bi2Sr2Can-1CunOx structure but the modulation pattern specific to the Bi2Sr2Can-1CunOx structure was not observed. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section B
Journal Volume
59/60
Journal Issue
pt.2
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
1443-1446
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
7. international conference on ion beam modification of materials (IBMM-7) and exposition.
Dates
9-14 Sep 1990.
Place
Knoxville, TN (United States).