Representation of ion implantation distributions in two and three dimensions

The representation of two- and three-dimensional point response functions by Pearson frequency distribution curves is discussed for the case of energetic ions implanted into homogeneous, amorphous material. Comparisons are made between the Pearson curves and high-resolution Monte-Carlo simulations. It is shown that no extra information is required to derive the three-dimensional representation once the two-dimensional representation is known. (author)