Development of high lateral and wide angle resolved hard X-ray photoemission spectroscopy at BL47XU in SPring-8

Highlights: •We describe the detailed design of a high lateral resolution and wide-angle-resolved HAXPES. •The lateral resolution with Kirkpatrick–Baez focusing mirrors is achieved 1 μm at the photon energy of 7.94 keV. •Total acceptance angle which we had been developed originally is achieved ±34° with a resolution of 1.32°. •This microprobe ARXPS is applied to studies on a buried interface profiles for advance in HAXPES. -- Abstract: In this study, we have realized a high lateral resolution and wide-angle-resolved hard X-ray photoelectron spectroscopy (HAXPES) facility at BL47XU in SPring-8. The system uses Kirkpatrick–Baez focusing mirrors to achieve a beam size of 1.0 μm (horizontal) × 0.98 μm (vertical) at the photon energy of 7.94 keV and a wide-acceptance-angle objective lens installed in front of the electron energy analyzer. The objective lens system, which we had been developed originally and has achieved a total acceptance angle of ±34° with a resolution better than that of an acceptance angle of 1.5°. The performance of this system was evaluated through core spectra measurements of a typical multi-layered sample of Ir (8 nm)/HfO2 (2.2 nm)/thickness-graded SiO2 (0–10 nm)/Si(0 0 1)