Published 1991 | Version v1
Report

Solid-state and materials research: improvement of facilities. Inverted cylindrical sputter-gun

  • 1. National Accelerator Centre, Faure (South Africa)

Description

Short communication

Part of:
NAC annual report March 1991

Additional details

Publishing Information

ISBN
1 8748 7703 3
Imprint Title
NAC annual report March 1991
Imprint Pagination
129 p.
Journal Page Range
p. 60.
Report number
NAC-AR--91-01

INIS

Country of Publication
South Africa
Country of Input or Organization
South Africa
INIS RN
24057649
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Progress Report, No Abstract, Non-conventional Literature
Descriptors DEI
ARGON; DEPOSITION; MAGNETRONS; OXYGEN; OXYGEN IONS; PROGRESS REPORT; SPUTTERING; SUBSTRATES; SUPERCONDUCTORS; THIN FILMS
Descriptors DEC
CHARGED PARTICLES; DOCUMENT TYPES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; IONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONMETALS; RARE GASES

Optional Information