Published 1991
| Version v1
Report
Solid-state and materials research: improvement of facilities. Inverted cylindrical sputter-gun
Description
Short communication
Additional details
Publishing Information
- ISBN
- 1 8748 7703 3
- Imprint Title
- NAC annual report March 1991
- Imprint Pagination
- 129 p.
- Journal Page Range
- p. 60.
- Report number
- NAC-AR--91-01
INIS
- Country of Publication
- South Africa
- Country of Input or Organization
- South Africa
- INIS RN
- 24057649
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Progress Report, No Abstract, Non-conventional Literature
- Descriptors DEI
- ARGON; DEPOSITION; MAGNETRONS; OXYGEN; OXYGEN IONS; PROGRESS REPORT; SPUTTERING; SUBSTRATES; SUPERCONDUCTORS; THIN FILMS
- Descriptors DEC
- CHARGED PARTICLES; DOCUMENT TYPES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; IONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONMETALS; RARE GASES