Published 2019 | Version v1
Journal article Metadata-only

Study of the process of thermal dissociation of tantal pentachloride in vacuum

Creators

  • 1. NSC "Kharkov Institute of Physics and Technology", Kharkov (Ukraine)

Description

The dependence of the degree of dissociation of TaCl5α(T, P) vapors on the temperature in the range of 1470...1820 K in a vacuum of 1.33·10-2 Pa was by using of equilibrium chemical thermodynamics obtained. The experimental data on the dependence of αex (T,P) on temperature and vapor mass flow TaCl5 were analyzed and compared with calculations.

Additional details

Additional titles

Original title (Russian)
Исследование процесса термической диссоциации пентахлорида тантала в вакууме

Publishing Information

Journal Title
Voprosy Atomnoj Nauki i Tekhniki
Journal Issue
no.2-114
Journal Page Range
p. 141-144
ISSN
1562-6016

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
50046529
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
COMPARATIVE EVALUATIONS; CRYSTAL GROWTH; DISSOCIATION; PHYSICAL VAPOR DEPOSITION; PRESSURE DEPENDENCE; SUBSTRATES; SURFACE COATING; TANTALUM CHLORIDES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 1000-4000 K; THERMODYNAMICS; VAPORS
Descriptors DEC
CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; EVALUATION; FLUIDS; GASES; HALIDES; HALOGEN COMPOUNDS; REFRACTORY METAL COMPOUNDS; SURFACE COATING; TANTALUM COMPOUNDS; TANTALUM HALIDES; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS