Published November 20, 1981 | Version v1
Journal article

Preparation of special film structures by ion beam techniques

  • 1. Technische Hochschule, Karl-Marx-Stadt (German Democratic Republic). Sektion Physik/Elektronische Bauelemente

Description

no abstract available

Additional details

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
85
Journal Issue
3-4
Series
Thin Solid Films.
Journal Page Range
265
ISSN
0040-6090

Conference

Title
International summer school on processes of thin film formation.
Dates
28 Sep - 4 Oct 1980.
Place
Fonyod, Lake Balaton, Hungary.

INIS

Country of Publication
Netherlands
Country of Input or Organization
Switzerland
INIS RN
13687841
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
FILMS; ION BEAMS; SPUTTERING; SYNTHESIS; VACUUM COATING; VAPOR DEPOSITED COATINGS
Descriptors DEC
BEAMS; COATINGS; DEPOSITION; SURFACE COATING

Optional Information

Notes
Short communication.