Published January 1980 | Version v1
Journal article

Structural characterization of amorphous vanadium pentoxide thin films prepared by chemical vapour deposition (CVD)

  • 1. Magyar Tudomanyos Akademia Biologiai Kutato Koezpontja, Szeged. Research Group on Luminescence and Semiconductors

Description

Amorphous vanadium pentoxide thin films were prepared by CVD of VOCl3 with H2O at room temperature. The amorphous-to-crystalline transition temperature of the material was found at about 2400C. The DTA curves and IR spectra showed that the films contained water. The V4+ content of the films was estimated from quantitative EPR measurements. The results verify that CVD is an appropriate method to produce near stoichiometric (V4+ content: 1.5-2.0%) amorphous vanadium pentoxide thin films. (orig.)

Additional details

Publishing Information

Journal Title
J. Non-Cryst. Solids
Journal Volume
35/36
Journal Issue
pt.2
Series
J. Non-Cryst. Solids.
Journal Page Range
1245-1248
ISSN
0022-3093