Study of YBCO thin films deposited by intense pulsed light ion beam evaporation

Preparation of thin films of YBCO on MgO (100) by means of intense, pulsed ion beam evaporation is reported. The films have been characterized by X-ray diffraction and electron probe microanalysis. We investigated the dependence of the film composition on target stoichiometry, substrate temperature and number of shots. The study reveals possibility of production of high quality films, c-axis perpendicular on the substrate surface, from 123 YBCO target, 7000C substrate temperature, single shot, vacuum deposited. Multishot depositions create off-stoichiometric films, Cu and Ba depleted, approximately by 43%-67% less than the target content in Cu or Ba. This could be explained as a reevaporation of the lower boiling temperature elements (Cu, Ba), by every new high temperature and energy ablated plume. (author)