Application of ozone-containing atmosphere for changing HTSP-film characteristics

Superconducting film Y-Ba-Cu-O for deeper copper oxidation prepared by the method of electron-X-ray sputtering with the excess of copper in chemical composition is subjected to low-temperature annealing in ozone-oxygen mixture. A shift of the beginning of superconducting transition from 85 to 94 K is detected. Simultaneously, semiconducting component of electrical resistance is sharply increased, that relates to oxidation of excessive copper. The conclusion about the possibility of using ozonization as a technological way of the improvement of HTSC-film characteristics is made