Published 1971
| Version v1
Book
New ion implantation areas
Creators
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Springer-Verlag New York, Inc.
- Imprint Place
- New York
- Imprint Title
- Ion Implantation in Semiconductors
- Imprint Pagination
- p. 430-438.
Conference
- Title
- 2. international conference on ion implantation in semiconductors.
- Dates
- 24 May 1971.
- Place
- Garmisch-Partenkirchen, Germany.
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 3029746
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DOPED MATERIALS; ION IMPLANTATION; OPTICAL PROPERTIES; QUARTZ; RADIATION EFFECTS
- Descriptors DEC
- OXIDES; PHYSICAL PROPERTIES; SILICON COMPOUNDS; SILICON OXIDES