Published 1984
| Version v1
Journal article
Determination of the hydrogen concentration in silicon nitride films with the resonant nuclear reaction 1H(15N,αγ)12C
Creators
- 1. Rijksuniversiteit Utrecht (Netherlands). Robert van de Graaff Lab.
- 2. Rijksuniversiteit Utrecht (Netherlands). Dept. of Technical Physics
Description
The resonant nuclear reaction 1H(15N,αγ)12C at resonance energy E(15N2+) = 6.40 MeV has been used to investigate the hydrogen concentration in silicon nitride films. This method is very suitable to determine hydrogen concentration profiles with a good depth resolution (approx. 5 nm) over a large depth (approx. 2 μm) and has a sensitivity of a few tenth of an atomic percent. (author)
Additional details
Publishing Information
- Journal Title
- Spectrochim. Acta, Part B
- Journal Volume
- 39B
- Journal Issue
- 12
- Series
- Spectrochim. Acta, Part B.
- Journal Page Range
- 1553-1556
- ISSN
- 0584-8547
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- United Kingdom
- INIS RN
- 16026236
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- ALPHA PARTICLES; CARBON 12; DEPTH; FILMS; GAMMA RADIATION; HYDROGEN; HYDROGEN 1; IMPURITIES; LAYERS; NITROGEN 15 REACTIONS; NUCLEAR REACTION ANALYSIS; RESOLUTION; SENSITIVITY; SILICON NITRIDES; SPATIAL DISTRIBUTION
- Descriptors DEC
- CARBON ISOTOPES; CHARGED PARTICLES; CHEMICAL ANALYSIS; DIMENSIONS; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELEMENTS; EVEN-EVEN NUCLEI; HEAVY ION REACTIONS; HELIUM IONS; HYDROGEN ISOTOPES; IONIZING RADIATIONS; IONS; ISOTOPES; LIGHT NUCLEI; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; NUCLEAR REACTIONS; NUCLEI; ODD-EVEN NUCLEI; RADIATIONS; SILICON COMPOUNDS; STABLE ISOTOPES