Published June 1989 | Version v1
Journal article

Specific features of divacancies annealing in silicon with disorder regions

  • 1. AN SSSR, Novosibirsk (USSR). Inst. Fiziki Poluprovodnikov

Description

Comprehensive investigation of annealing character for divacancies in n-type silicon irradiated by neutrons is conducted. Comprehensive analysis of DLTS experiment data has shown, that annealing occurs in two stages. High-temperature stage (300-350 deg C, Ea=1.5 eV activation energy) is linked with divacancies annealing in crystal matrix. Low-temperature stage (100-200 deg C, Ea=1.0eV) is caused by approach of interstitial type defects to divacancies localized in PO nucleus

Additional details

Additional titles

Original title (Russian)
Особенности отжига дивакансий в кремнии, содержащем разупорядоченные области

Publishing Information

Journal Title
Fizika i Tekhnika Poluprovodnikov
Journal Volume
23
Journal Issue
6
Series
Fiz. Tekh. Poluprovodn.
Journal Page Range
1076-1079
ISSN
0015-3222
CODEN
FTPPA