Published March 1996 | Version v1
Journal article

The insertion of a small Mevva source inside an electron cyclotron resonance: Status report

  • 1. I.N.F.N. Laboratori Nazionali di Legnaro, via Romea n. 4, I-35020 Legnaro (Italy)
  • 2. ITEP, Bolshaja Cheremushkinskaja 25, 110000, Moscow (Russia)

Description

A miniaturized Mevva source, designed to be inserted in an electron cyclotron resonance (ECR) source in order to sputter metals, was proposed to supplement our ECR source Alice. The major problem was to control the Mevva arc at the low level of current (20 endash 30 A for Al, Cu), which are required to limit metal consumption. Installation of our Mevva in a separate test stand was completed. Extensive electrical tests are here reported, discussing components that were rebuilt and optimized during experiments. The improvement in trigger voltage (10 kV) and rise time (3 μs) obtained by an air transformer, with little help from a ferrite core, allowed a reliable arc start-up. Increasing the main voltage was also important, as was evident from the new ferrite transformer (giving 3.5 kV instead of 2 kV) and from the detailed shape of arc voltage in some shots, where wide fluctuation appeared. A neutral beam spectrometer for the MetAlice experiment is being developed. Perspective of schematic improvement and of installation in Alice are discussed. copyright 1996 American Institute of Physics

Additional details

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
67
Journal Issue
3
Journal Page Range
p. 1207-1209.
ISSN
0034-6748
CODEN
RSINAK

Conference

Title
6. international conference on ion sources.
Dates
10-16 Sep 1995.
Place
Whistler (Canada).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
28031807
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AMP BEAM CURRENTS; DESIGN; ION SOURCES; METALS; OPTIMIZATION; SPUTTERING
Descriptors DEC
BEAM CURRENTS; CURRENTS; ELEMENTS

Optional Information

Secondary number(s)
CONF-9509125--.