Kinetics of transition layer formation during coating deposition from ion beams

A model is proposed for the formation of a transition layer during coating deposition from ion beam. A nonstationary equation is derived and solved describing the dynamics of transition layer. A method is proposed for measuring the concentration depth distribution of the coating components on the base of ultrasoft X-ray emission spectroscopy. The agreement of the results obtained by two independent experimental methods and, also, the theoretical results, demonstrated for carbon coating on aluminium substrate, taken as an example, indicates reliability of the proposed theory and experimental X-ray spectral method of control of the composition