Published 2011
| Version v1
Miscellaneous
On problem of application of cluster bombarding ions for SIMS analysis of silicon
Creators
- 1. Inst. Ehlektroniki im. U.A. Arifova AN RUz, Tashkent (Uzbekistan)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- К вопросу об использовании кластерных бомбардирующих ионов для ВИМС-анализа кремния
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLI International conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 211 p.
- Journal Page Range
- p. 94
- Report number
- INIS-RU--526
Conference
- Title
- 41. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XLI mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 2011
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 43014847
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ADSORPTION; BORON ADDITIONS; DEPTH; EXPERIMENTAL DATA; GOLD IONS; ION EMISSION; ION PAIRS; KEV RANGE 10-100; MASS SPECTROSCOPY; MOLECULAR IONS; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; SECONDARY EMISSION; SILICON; SPATIAL DISTRIBUTION; SPUTTERING; YIELDS
- Descriptors DEC
- ALLOYS; BORON ALLOYS; CHARGED PARTICLES; CRYSTALS; DATA; DIMENSIONS; DISTRIBUTION; ELEMENTS; EMISSION; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; NUMERICAL DATA; RADIATION EFFECTS; SEMIMETALS; SORPTION; SPECTROSCOPY
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XLI mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami