Published June 1990 | Version v1
Journal article Metadata-only

Interaction of deposited vanadium with residual atmosphere during vacuum plating

Creators

Description

By the methods of Auger-electron spectroscopy and secondary ionic mass-spectrometry the composition of vanadium films produced by electron-beam evaporation in vacuum has been studied. The influence of oxygen and carbon impurities from vacuum chamber residual atmosphere on the shape of vanadium Auger spectra is shown

Additional details

Additional titles

Original title (Russian)
Взаимодействие конденсатов ванадия с остаточной атмосферой при вакуумном напылении

Publishing Information

Journal Title
Izvestiya Akademii Nauk SSSR, Metally
Journal Issue
no.4
Series
Izv. Akad. Nauk SSSR, Met.
ISSN
0568-5303
CODEN
IZNMA

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
22059282
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANNEALING; CHEMICAL COMPOSITION; HIGH TEMPERATURE; IMPURITIES; PHASE STUDIES; VANADIUM; VAPOR DEPOSITED COATINGS
Descriptors DEC
COATINGS; ELEMENTS; HEAT TREATMENTS; METALS; TRANSITION ELEMENTS