Published 1999
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Influence of substrate temperature on the optical and electrical properties magnetron sputtering ITO films
Creators
- 1. Khar'kovskij Gosudarstvennyj politekhnicheskij universitet, Khar'kov (Ukraine)
Description
Electrical and optical properties of ITO films obtained at substrate temperature from 200 degree C to 500 degree C by magnetron sputtering of target 95% In2O3 - 5% SnO2 were studied. It was shown that the ITO film obtained at the substrate temperature 300 iN have optimum combination of the optical and electrical characteristics: resistivity 2.1 centre dot 10-4 Ω cm, transmittance in visible spectral range about 88% at the thickness film 0.61 μ, factor of quality reaches 8.2 centre dot 10-2 Ω1
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Additional details
Additional titles
- Original title (Russian)
- Влияние температуры подложки на электрические и оптические свойства пленок ITO, полученных методом магнетронного распыления
Publishing Information
- Imprint Title
- 3. International Symposium 'Vacuum Technology and Equipment'. ISVTE-3
- Imprint Pagination
- 174 p.
- Journal Page Range
- p. 247-249
- Report number
- INIS-UA--071(V.2)
Conference
- Title
- 3. International Symposium 'Vacuum Technology and Equipment', Vol. 2
- Original Conference Title
- Trudy tret'ego mezhdunarodnogo simpoziuma 'Vakuumnye tekhnologii i oborudovanie', Tom 2
- Dates
- 22-24 Sep 1999
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 32051687
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRIC CONDUCTIVITY; INDIUM OXIDES; MAGNETRONS; OPTICAL PROPERTIES; SPUTTERING; SUBSTRATES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; THIN FILMS; TIN OXIDES
- Descriptors DEC
- CHALCOGENIDES; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; INDIUM COMPOUNDS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TEMPERATURE RANGE; TIN COMPOUNDS
Optional Information
- Notes
- Imprint:3. Mezhdunarodnyj Simpozium 'Vakuumnye tekhnologii i oborudovanie'. ISVTE-3