Published May 28, 2012
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Electrodeless wet etching of n-GaN assisted with ultraviolet light
Creators
- 1. Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, 81219 Bratislava (Slovakia)
Description
In this paper we studied photo-assisted electrodeless etching (ELPEC) of n-GaN in a K2S2O8/KOH solution irradiated continuously with UV light. We investigated the impact of mask material on n-GaN patterning. As mask material thin layers of Ti, Pt and Au were used. The ratio of mask covered surface area to uncovered one was 7:1, 1:2 and 1:5. The K2S2O8 oxidizing agent concentration was kept in the range from 0.006 to 0.1 M, the KOH electrolyte concentration was kept in the range from 0.004 to 0.04 M. (authors)
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48042889.pdf
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Additional details
Identifiers
Publishing Information
- Publisher
- Slovak University of Technology
- Imprint Place
- Bratislava (Slovakia)
- ISBN
- 978-80-227-3720-3
- Imprint Title
- Proceedings of the 18th International Conference on Applied Physics of Condensed Matter
- Imprint Pagination
- 369 p.
- Journal Page Range
- p. 235-238
- Report number
- INIS-SK--2017-027
Conference
- Title
- 18. International Conference on Applied Physics of Condensed Matter
- Acronym
- APCOM 2012
- Dates
- 20-22 Jun 2012
- Place
- Strbske Pleso (Slovakia)
INIS
- Country of Publication
- Slovakia
- Country of Input or Organization
- Slovakia
- INIS RN
- 48042889
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- ETCHING; EXPERIMENTAL DATA; GALLIUM NITRIDES; MATERIALS HANDLING; NANOSTRUCTURES; PHOTOPRODUCTION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SOLID STATE PHYSICS
- Descriptors DEC
- BASIC INTERACTIONS; DATA; ELECTROMAGNETIC INTERACTIONS; ELECTRON MICROSCOPY; GALLIUM COMPOUNDS; INFORMATION; INTERACTIONS; MATERIALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; NUMERICAL DATA; PARTICLE INTERACTIONS; PARTICLE PRODUCTION; PHYSICS; PNICTIDES; SURFACE FINISHING
Optional Information
- Contract/Grant/Project number
- Grants VEGA-01/0689/09; VEGA-01/0459/12
- Notes
- 4 figs., 5 refs. Imprint:Published also on CDROM 32 MBytes in PDF format