Published 2005 | Version v1
Book Metadata-only

Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams

Creators

  • 1. Nuclear Physics Inst. at Tomsk Polytechnic Univ., Tomsk (Russian Federation)

Description

The films of titanium and carbon deposited onto silicon and α-Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and target and with decreasing film thickness. Characteristics of different coatings are compared

Abstract (Russian)

Исследуются пленки титана и углерода, осажденные на Si- и Fe-подложках при использовании ионных пучков. Изучаются адгезионная прочность (АП) и пластичность покрытий, полученных при разных условиях осаждения. Показано, что АП увеличивается с увеличением расстояния между подложкой и мишенью и с уменьшением толщины пленки. Сравниваются характеристики разных покрытий
Part of:
15th International conference on high-power particle beams. BEAMS'2004. Proceedings

Additional details

Publishing Information

Publisher
D.V. Efremov Scientific Research Inst. of Electrophysical Apparatus
Imprint Place
Saint-Petersburg (Russian Federation)
ISBN
5-87911-088-5
Imprint Title
15th International conference on high-power particle beams. BEAMS'2004. Proceedings
Imprint Pagination
922 p.
Journal Page Range
p. 643-646

Conference

Title
15. International conference on high-power particle beams. BEAMS'2004
Dates
18-23 Jul 2004
Place
Saint-Petersburg (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
37070143
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ADHESION; CARBON; COATINGS; DEPOSITION; IMAGES; ION BEAMS; IRON; PHYSICAL RADIATION EFFECTS; PLASTICITY; SILICON; SUBSTRATES; THICKNESS; THIN FILMS; TITANIUM
Descriptors DEC
BEAMS; DIMENSIONS; ELEMENTS; FILMS; MECHANICAL PROPERTIES; METALS; NONMETALS; RADIATION EFFECTS; SEMIMETALS; TRANSITION ELEMENTS

Optional Information

Notes
5 refs., 5 figs., 1 tab.